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Series  108   UHV gate valve Area of application: The standard for UHV applications in the semiconductor industry and in R&D. Description: These standard UHV gate valves are for many applications. They are bellows sealed and their mechanism is free of lubricants. The approved VATLOCK sealing principle ensures a virtually shock-free locking. Nominal inside diameters (ID): 63 (2 1/2") - 320 (12") Body material: Stainless steel Actuator types: Manual actuator (hand wheel), Pneumatic actuator (double acting) Feedthrough: Bellows Sealing technology: VATLOCK-System Sealing materials: Bonnet: Metal / Gate: FKM (VITON®) Cycles until first service: 50'000 cycles Leak rate: Body: < 5 . 10-10 mbar ls-1 Valve seat: < 1 . 10-9 mbar ls-1 ID:  * 63 (2 1/2") 100 (4" ) 160 (6" ) 200 (8" ) 250 (10") 320 (12") Flange:  * ASA-LP (compatible with ANSI B. 16.5) CF-F fixed flange metric threads (compatible with ISO 3669 Fig.2) CF-F fixed flange UNF threads (compatible with ISO 3669 Fig.2) ISO-F (compatible with ISO 1609 Fig.1) Actuator:  * Hand wheel Manual with position indicator Pneumatic with position indicator with solenoid 3-position pneumatic Pneumatic with position indicator with solenoid double acting Pneumatic with position indicator no solenoid 3-position pneumatic Pneumatic with position indicator no solenoid double acting Pneumatic no position indicator no solenoid double acting › Details Options Catalog pages Accessories

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